B8.1 - Sensors for geometric accurate measurements in manufacturing

Albert Weckenmann, Oezguer Tan, Joerg Hoffmann, Alexander Schuler & Stephanus Buettgenbach
Main idea for every dimensional measurement is the detection of the surfaces or a group of points on an object by means of a probing system. The application of this fundamental idea in the field of micro and nano metrology, with size aspects or part tolerances in the sub micrometer regions, is very challenging. This task requires the application of precise length measuring systems for setting up a coordinate system and suitable sensors. The aim...