B8.4 - Optical 3D Measurement of Micro Structures

Andreas Ettemeyer, Michael Marxer & Claus Keferstein
Proving the performance of high precision micro components requires special knowledge and techniques in their design and manufacture. With dimensions ranging from less than 0.1 mm to several mm, such components are often delicate and fragile and require non contact measurement techniques. This calls for the use of optical inspection techniques. Optics offers many advantages such as very fast, non contact inspection, no influence on the measured object, 3D measurement capability, full field inspection and...