P1.11 - Proposal of the Thin Film Pirani Vacuum Sensor Still Sensitive Above 1 Atmosphere

Takashima Noriaki & Kimura Mitsuteru
We have extended measurable pressure range of the thin film Pirani vacuum sensor that is still sensitive above 1 atmosphere (atm). In our thin film Pirani vacuum sensor, our proposed temperature difference sensor of the short circuit Seebeck-current detection type thermocouple is used in order to get extremely high sensitivity, especially in high vacuum range. A little temperature difference, which should be zero under very high vacuum, between the microheater and the thermally isolated heading...