P1.12 - Materials-based Modelling of Packaging Effects on the Accuracy of Micro-Sensors

Erik Deier & Juergen Wilde
In order to predict the performance of micro-systems in the development process, simulation has become an indispensable tool. Thermo-mechanical effects are among the strongest ones affecting the accuracy of micro-mechanical sensors. In this work, the procedures to predict the functional behaviour of microdevices correctly are demonstrated, taking into account packaging and assembly effects. The necessary models and data for a prediction of the thermo-mechanical behaviour are presented. The simulation accuracy depends substantially on the quality...