P1.13 - Application of a Touch-Probe Array for the Parallel Measurement of Microstructures

Christian Schrader, Rainer Tutsch, Stephanus Buettgenbach & Thomas Krah
This paper deals with the development of a coordinate measuring machine for parallel tactile probing of microstructures. The particular challenges due to the parallel probing will be discussed and the concluding results regarding the construction, the control and the calibration will be outlined.