P1.14 - Miniaturised Ceramic Packages for Piezoresistive Pressure Sensors

Christian Wohlgemuth, Anton Leidl, Gregor Feiertag & Wolfgang Pahl
The precision of piezoresistive pressure transmitters is often limited by packaging effects. Especially the mounting of the sensor die plays a decisive role. While non-linearity and temperature dependence of the MEMS sensor itself can be compensated by signal conditioners, this is not possible for hysteresis and drift effects caused by inadequate die mounting. Coatings on the sensor die also emerge measurement errors. In this paper the effects of mounting on the sensor die are described...