P1.3 - Measuring System for Non-Contact Oscillation Measurement

M. Ringe, S. Patzelt, D. Kruse, H. Prekel & G. Goch
This paper summarizes the investigations and results of an R&D project concerning a measuring system for a non-contact amplitude and direction measurement of periodic and aperiodic lateral device oscillations. It is based on the detection and analysis of scattered light speckle patterns caused by rough surfaces and can be manufactured at low costs, qualifying it for the integration into production processes and assembly lines.