P1.7 - FEM Electromechanical Modelling of a MEMS Variable Capacitor for RF Applications

Parisa Ture Savadkoohi, Jacopo Iannacci, Benno Margesin & Alena Repchankova
Accurate modelling of the electromechanical behaviour of RF-MEMS devices is critical in order to predict their characteristics, and consequently how the design has to be optimized in order to overcome the trade-offs arising when dealing with specifications both in the mechanical and electrical/electromagnetic physical domains. In this work we present a complete approach to the simulation of RF-MEMS devices based on FEM (Finite Element Method) simulations performed in ANSYSTM Multiphysics.