P4.5 - Comparison of resolution specifications for micro- and nanometer measurement techniques

Albert Weckenmann, Özgür Tan, Laura Shaw & Nils Zschiegner
In most of the measurement tasks of micro- and nanotechnology, a high resolution of the instrument is required. However in most cases, resolution specification of the manufacturer could not be verified due to the lack of an acceptance test for the experimental investigations. In many cases, specification of the resolution is directly taken from the manufacturing specifications, which are mostly theoretically calculated values and do not always represent the real performance of the system. Instrument...