A2.1 - Modeling and Signal Processing Approaches for SAW Chemical Sensors

G. Fischerauer
Microacoustic chemical sensors based, for instance, on quartz crystal microbalances (QCM) or surface acoustic wave (SAW) devices have been popular in laboratories around the world for almost 30 years. They have also met with some commercial success, and one of the underlying effects, viz., mass loading, is routinely used in thin-film technology to monitor film growth during deposition. This contribution aims at reviewing the principles of such sensors and the strategies applied to model the...