A4.1 - Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure

J. C. Lötters, R. J. Wiegerink, T. S. J. Lammerink, J. Haneveld & T. A. G. Hagemann
Outline of the problem We have fabricated a micro Coriolis mass flow sensor using silicon nitride as the tube material. We demonstrated that a silicon nitride sensor could reach a resolution of the order of 10 milligram/hour. In the meantime, we added an integrated capacitive read-out. However, actuation was still done using Lorentz forces in combination with large external magnets. Innovation of the solution We have realised a micromachined micro Coriolis flow sensor with integrated...