A5.4 - Micromachined Ultra Low-Power Sensor for Angular Resolved Flow Measurement

S. Cerimovic, F. Keplinger, A. Talic, R. Beigelbeck, F. Kohl, B. Jakoby & H. Antlinger
Miniaturized sensors based on the calorimetric principle consist typically of a resistive thin-film heater surrounded by a conveniently arranged thermistor array, all embedded in a thin membrane. They rely on flow dependent heat transfer altering the temperature distribution near the heater. The sensors offer high spatial and directional resolution at the expense of high power consumption (typically in the mW range) due to resistive heating. In order to reduce the dissipated power, we developed a...