A8.1 - Merging the Ultrasonic and Microacoustic Sensor Principles

R. Lucklum, M. Ke & M. Zubtsov
Ultrasonic sensors and acoustic (resonant) microsensors are well accepted devices in many application fields. Both principles are based on acoustic wave propagation where the value of interest perturbs wave propagation in a distinct manner. The sensing capabilities of resonant microsensors result from the high Q-factor of the resonator and precise determination of the resonant frequency. Similarly, the time of flight of an ultrasonic burst traveling through the object of interest can be determined with high...