B1.1 - Trends of Piezoresistive Sensor Technology

P. Krause, H. Michels & G. Varma
Pressure and temperature are the most frequently measured characteristics. Pressure sensors are present in all kinds of daily applications. The most important are automotive, industrial and medical applications. Today several principles are applied for pressure measurement and most principles measure a deflection of a membrane. Piezoresistive pressure sensors are among the most frequently used measurement principles. The presentation shows the current technological status of piezoresistive pressure sensors and its future development along the value chain....