B1.4 - Ultra-Thin Resistors for Piezoresistive Sensors

B. Schmidt, M. Zier, P. Philipp & J. Potfajova
Piezoresistors in silicon has found applications in different kinds of sensors, for example in pressure sensors, accelerometers, multi-axis flow sensors and tactile sensor arrays. The emerging use of piezoresistive elements for deflection sensing of scanning probe cantilevers in Atomic Force Microscopy (AFM) is governed by efforts to overcome limited speed imaging and throughput using monolithically integrated arrays of AFM cantilevers. Consequently, to the integration of the detecting piezoresistive sensor, electro-thermal actuator integration into the cantilever...