B3.4 - Amplitude Response of an Overload-Resistant Pressure Sensor

T. Kober & R. Werthschützky
Differential pressure sensors with silicon diaphragms provide a nominal measuring range of 10 mbar. An additional external overload protection mechanism is required to achieve an overload reserve up to 160 bar. To integrate the overload protection at the wafer level, a micromechanical overload protection is needed. Such a micromechanical overload protection for differential pressure sensors can be produced from heat-treated glass. Here, we demonstrate an overload capability reaching 50 bar for a silicon diaphragm with...