B4.1 - Acceleration Sensor IP-Blocks for MEMS Foundry Surface Micromachining Process

R. Knechtel, S. Dempwolf, S. Hering, Th. Link, M. Tr├Ąchtler, J. Dehnert & D. Hoffmann
Using silicon based MEMS technologies, the cost-efficient production of inertial sensors has become possible in recent years. Meanwhile ready to use MEMS foundry technologies allows both the manufacturing of high volumes and small series. Since the technology is developed and provided by the MEMS foundry the main challenge for bring an inertial sensor to the market is the chip design, for which MEMS design experiences are required. To give customer support at this point IP...