B4.4 - Uncertainties of a Linear Variable Differential Inductor Probe for Picometer Resolution Measurement Systems

B. Aschenbrenner & B. Zagar
The ever increasing quality demand of machine components and machines in industry has been the driving force behind research for more accurate measurement methods. Precisison measurement systems that can achieve a displacement accuracy in the order of sub-nanometers are essential in the optical, semiconductor and nanotechnology industry and ultraprecise machining. In the proposed paper we discuss a range of parameters that can potentially lead to un- certainties in a highest resolution displacement system. A Linear...