B5.2 - Packaging Challenges for Monolithically Integrated Mircosensors

M. Streiff
Within a time span of 12 years Sensirion has established itself as an industry leader in microchip based sensing of differential pressure, and flow measurement and control devices for gases and liquids. In particular, Sensirion is now regarded as the industry leader in combined temperature / humidity sensors, with respect to both market share and ability to innovate. This article will focus on humidity sensing, in particular, on the packaging challenges that were encountered on...