B7.3 - Instrinsic Flow Control of a Piezo Membrane Pump

S. Dahms, J. Uckelmann & U. Michelsen
The market for micropumps is steadily emerging especially in the field of medical products. In some applications however membrane type pumps suffer from flow rate dependency on backpressure for example. This disadvantage can be overcome by implementing flow control. While a few approaches with off the shelf micropumps and flow sensors have been demonstrated, up to now no controlled-loop system with a fully integrated flow sensor is on the market. Here an innovative approach is...