B7.4 - Application Specific Micro Scanning Mirrors

Th. Sandner, H. Schenk & C. Drabe
Use of Micro Scanning Mirror Technology offers several advantages like high frequency scanning and extreme miniaturization of scanning systems. However, cost for technology development in particular for application specific requirements are high and often the development time is too long. At Fraunhofer IPMS a qualified micro scanning mirror technology with high flexibility and several options including integrated position sensors and diffraction gratings was developed1. The process, offered by MEMS Technologies Dresden, is based on the...