B8.3 - Application of Sacrificial Layers for the Modular Micro Sensor Fabrication on a Flexible Polymer Substrate

T. Griesbach, M. C. Wurz & L. Rissing
A concept for the fabrication of modular micro sensors on flexible substrates is presented in this paper. For the fabrication of micro sensors on flexible polymer substrates, investigations on sacrificial layers are essential, since it must be possible to release the sensors at the end of the fabrication process. This paper describes the development and fabrication of an anisotropic magneto-resistance (AMR) sensor on a 5 μm thick SU-8™ layer, which is an epoxy based photosensitive...