C1.3 - The Multipole Resonance Probe: From Simulation to Prototype

R. Storch, M. Lapke, J. Oberrath, C. Schulz, T. Styrnoll, P. Awakowicz, R. P. Brinkmann, T. Musch, T. Mussenbrock, I. Rolfes & C. Zietz
Due to the dependencies of surface characteristics on the plasma parameters in coating processes it is obvious that supervising and controlling these parameters is inevitable. In this paper the development of a novel probe called “Multipole Resonance Probe” (MRP) is presented. The theoretical background to this concept relying on the well known plasma resonance spectroscopy is described in. This method enables the simultaneous determination of electron density ne, electron temperature Te and collision frequency ν...