C6.4 - Towards a Magnetostrictive Mirco-Loudspeaker

Th. Albach, P. Horn, J. Ilg, S. Friedrich, A. Sutor & R. Lerch
Until now, there does not exist any commercial integrated MEMS-device for sound generation in the audio range. However, some effort has been made using electromagnetic, electrodynamic or piezoelectric actuation principles. At the Lehrstuhl für Sensorik at University Erlangen-Nürnberg we have been developing a micro-actuator (MEMS) based on Joule magnetostriction taking advantage of the high energy density of this actuation principle. In this contribution we demonstrate its performance as a micro-loudspeaker. The active area has a...