D4.3 - Application of Micro- and Nanotechnologies for NDIR-Gas Measurements in Harsh Environments

R. Buchner, T. Stolberg-Rohr, K. Pihl, J. S. Hansen, S. Trojaga, A. Krishna, H. G. Moos & J. M. Jensen
A new infrared gas sensor technology for measurement of relevant parameters for climate and emission control has been developed, such as temperature, humidity, CO2, NOx and other gasses in harsh environments and as close to the source of emission as possible. Exact determination of these parameters improves climate and process control leads to significant energy savings and reduction of emission. By combining highly sensitive thin-film thermopiles with fast MEMS-based infrared sources and specific IR-optical components,...