P3.5 - Impact of Dopants on the Characteristics of Thin-Film Humidity Sensor Elements

S. Kozhukharov, M. Machkova, T. Nenov & Z. Nenova
Humidity measurement in mixtures of gases – and in the air in particular – is a widely researched topic in a number of scientific and technical fields. Air humidity or the humidity of a technological gas is one of the important parameters, determining the quality of the products of a multiple of technological processes. Therefore it is important to improve the already existing and develop new humidity sensors. One of the directions for addressing this...