P3.6 - Multifunctional T/RH-Sensitive Thick-Film Structures for Environmental Sensors

H. Klym, I. Hadzaman, O. Shpotyuk & M. Brunner
The problem of simultaneous temperature and relative humidity T/RH control consists in principally different sensitivities of monitored solid-state system to thermally- and moistureactivated environmentally-induced processes. Functional spine-type ceramics are known to be widely used for T and RH measurement. The main aim of this work is to develop integrated multilayer T/RH-sensitive thick-film structures for multifunctional sensor application. To prepare multifunctional T/RH-sensitive sensor elements, we used Cu0.1Ni0.1Mn1.2Co1.6O4 –based compound with p+-type of electrical conductivity, p-conductive Cu0.1Ni0.8Mn1.9Co0.2O4...