P6.3 - Novel Carbon-Based Materials for Pressure and Force Sensors

H. Schmid-Engel, D. Göttel, G. Schultes, R. Koppert & U. Werner
Amorphous carbon–based materials are well known for their high mechanical hardness and chemical inertness making them ideal candidates for wear-resistant coatings. We however focus on the electrical and morphological properties of metal containing hydrogenated amorphous carbon (Me:a-C:H) thin films. Depending on the metal content, the conductivity changes over 12 orders of magnitude. Moreover the material acts as a piezoresistor, reacting on mechanical strain as well as on hydrostatic pressure. One key aspect for the application...