P6.4 - MEMS Technology for Production of Different Micro- and Nanodevices

A. M. Kudanovich, N. I. Mukhurov, L. R. Paleuskaya & Y. V. Mironchyk
Production of microelements and microstructures from anodic alumina (АА) is based on a basis on unique self-organizing morphology formed homogeneous and nanosized pores which are distributed to all length of a film. Production of different micro- and nanosensors and micro- and nanostructures can be carried out by two ways. The first is based on anisotropic etching of АА, and the topology is formed by usual photolithography. The second way of production of micro and nanodevices...