P6.9 - Development of New Capacitive Strain Sensor Based on Transparent Conductive Oxides Thin Films

A. Ghinea & A. Klein
Capacitive sensors can directly sense a variety of variables such as pressure, acceleration, fluid level and fluid composition which induce changes of capacitor dimension or dielectric constant. This work is focused on developing a transparent capacitive strain sensor using the thin film technology. We have investigated the strain sensing characteristics of transparent conductive oxides (like indiumtin oxide) and of interface between transparent electrode and dielectric material. The thin films were grown on different substrates by...