P8.3 - Design, Fabrication and Characterization of a Novel 3D Force Sensor Made of SU-8

A. Jordan, A. Phataralaoha, A. Tibrewala & S. Büttgenbach
This work presents an innovative approach to develop highly sensitive piezoresistive 3D force sensors made of SU-8 photoresist and diamondlike carbon (DLC). Therefore a low cost fabrication process is developed accompanied by design studies and an estimation of mechanical properties of the deforming elements. The results of this study provide a comparison between characteristics of 3D force sensors made of SU-8 and silicon. The design of the SU-8 force sensor is based on a boss-membrane....