P8.4 - Optimized Electrical Feed Through for a Piezoresistive Silicon High-Pressure Sensing Element up to 500 MPa

P. Heinickel, R. Werthschützky & W.-J. Hummel
Applications involving high-pressure are becoming increasingly common in engineering today; these also include mass production applications. In addition to automotive systems (up to 300 MPa in research), there are applications like water jet cutting and hydroforming of up to 600 MPa. The recently developed, optimized and presented high-pressure sensing element for a measuring range up to 500 MPa (is equivalent to 5 000 bar and about 72 500 psi) consists of a solid silicon chip...