B1.1 - Advanced Finite Element Schemes for Multiphysics

M. Kaltenbacher & S. Triebenbacher
The design of modern sensors and actuators, which are often Micro - Electro - Mechanical - Systems (MEMS), strongly depends on the availability of appropriate computer simulation tools, since the fabrication of each prototype is quite costly. We present an advanved Finite Element (FE) scheme for the design of viscosity sensors, which takes the full coupling between flow dynamics and structural mechanics into account.