B6.4 - Effects on the Calibration of Instruments in Surface Metrology

Ö. Tan
Thanks to the improvements in manufacturing techniques, it is becoming more common to alter the functional performance of products by controlling the geometrical properties of technical surfaces. The required characterization of surfaces can be done by using different optical measurement techniques. In order to have reliable measurement results, one of the pre-requisite is the proper calibration of the instrument. Although new ideas, like 3D Siemens-Star are becoming available in surface metrology, complexity of optical measurement...