C2.3 - A monolithic integrated MEMS in a 350 nm technology for filter monitoring applications

St. Heinz, K. Erler, J. T. Horstmann, M. Neubert, R. Seidel, A. Pohle, Ch. Gross, A. Rönisch & P. D. Gabriel
This paper presents a system which combines a modern 350 nm mixed-signal CMOS technology with a MEMS technology for monitoring of the filter contamination level of suction and filtering systems. Therefore the system includes a piezoresistive pressure sensor, a controller core, a power management, a digital and analog signal processing with a variable gain up to 270 and an 8 bit autonomous offset adjust as well as a RFID interface to allow wireless transfer of...