D9.3 - State of the Art Telemetric Implantable Sensors and Their Encapsulation

M. Kraft, M. Görtz, J. A. Müntjes, W. Mokwa, N. J. Cleven & T. Schmitz-Rode
MEMS sensor have the potential to revolutionize medical implants. Their advantages are a small form factor, low power consumption and the ability to operate by telemetry. While some MEMS sensors, for example to measure pressure, have reached a high level of maturity, their encapsulation for long term implants remains problematic. Here, a novel encapsulation a technique is presented that combines flexibility with long term stability. It relies on a two layer approach: the outer thicker...