P3.4 - Fabrication of Silicon Oxycarbide-Based Microcomponents via Photolithographic and Soft Lithography Approaches

E. Ionescu, S. Martinez Crespiera, M. Schlosser, R. Riedel, K. Flittner & H. F. Schlaak
This study presents the preparation of ceramic micro components starting from a commercially available polysiloxane. The ceramic micro components were prepared via photolithographic and soft litho¬graphy approaches. The ceramic samples prepared upon photolithography exhibit aspect ratios of 3:1 as well as dimensions down to 20 μm. Furthermore, soft lithographic techniques have been used to prepare dense, crack free and complex-shaped SiOC-based micro components (e.g., a valve seat for a miniaturized burner).