OP10 - Interference Measurement of Rough Surface Relief

Oleg V. Angelsky, Olexander P. Maksimyak & Peter P. Maksimyak
The optical techniques are non-contact, non-destructive and highly efficient for diagnostics of rough surfaces. The optical techniques may be divided into profile interference and heterodyning techniques, techniques based on measuring of the angular distribution of scattered radiation3, and optical correlation techniques. High operation rates, data processing in the optical channel, high accuracy of measurements, feasibilities for real-time data processing, and small sizes of the measuring devices are the main advantages provided by optical correlation diagnostic...
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