OP4 - Multi Wavelength Interferometry for High Precision Distance Measurement

Juergen Petter
Precision in mechanical fabrication increased drastically within the last years. In many areas of industrial fabrication these days the precision of production processes reaches beyond the scale of micrometers, while diamond grinded metallic surfaces can be manufactured with optical quality even without finishing polish. High precision optics, aspheric lenses or optical freeforms are produced with only nanometer tolerance while the positioning of bearings and object carriers (e.g. in wafer procession) needs subnanometer resolution. Such high...
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