B7.3 - Field Effect SnO2 Nano-Thin Film Layer CMOS-Compatible

J. J. Velasco-Velez, A. Chaiyboun, T. Doll, C. Wilbertz, J. Woellenstein & M. Bauersfeld
The integration of metal oxide gas sensing layers into CMOS electronic still a challenge especially due to the high operating temperatures that do not comply with silicon transistor limits , even more critical, and metal oxide annealing temperatures. External electric fields will allow control over the energy levels of the sensing layer and thus over adsorption sensitivity, consequently the interaction between gas and sensitive layer is modulated. As the absorbed gas on the surface produces...
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