B8.2 - Three dimensional tactile-optical probing for the measurement of microparts

Rainer Tutsch, Markus Petz, Matthias Andraes, Thomas Wiedenhoefer, Ulrich Neuschaefer-Rube & Mark Wissmann
The determination of structures on microparts requires particularly sensitive measuring devices. Here the so called fiber probe is an outstanding, established solution. As probing forces are in the order of some μN the surface of the object under test will not be damaged by the probing element. Furthermore effects of the probing force on the measurement uncertainty can be neglected. Beyond that so far inaccessible micro geometries (like e.g. deep, small holes with diameters less...
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