D4.3 - Silicon probing tips coated with protective aluminum oxide thin films for fast tactile cantilever sensors

H. S. Wasisto, F. Yu, M. A. Deeb, L. Doering, U. Brand, A. Bakin, A. Waag, E. Peiner & St. Völlmeke
Silicon microprobe tips are fabricated and integrated with piezoresistive cantilever sensors for fast surface roughness scanning systems. A combination of wet and inductively coupled plasma (ICP) cryogenic dry etching processes is employed to create high-aspect-ratio tips. For the wear-resistant tip coatings, atomic-layer deposition (ALD) technique is applied to deposit conformal ~14 nm thick aluminum oxide (Al2O3) layers using a binary reaction sequence in low thermal process with precursors of trimethyl aluminum (TMA) and water (H2O)....
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