Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality.

Wing H. Ng, Nina Podoliak, Peter Horak, Jiang Wu, Huiyun Liu, Will Stewart & Anthony J. Kenyon
Data used in publication: Wing H. Ng, Nina Podoliak, Peter Horak, Jiang Wu, Huiyun Liu, William J. Stewart, and Anthony J. Kenyon, "Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality" submitted to SPIE Microtechnologies conference, 4-6 May 2015, Barcelona, Spain
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