Effect Of Chemical Additive On Fixed Abrasive Polishing Of Lbo Crystal With Non-Water Based Slurry

Jun Li, Wenze Wang, Zhanggui Hu, Yongwei Zhu & Dunwen Zuo
Non-water based fixed abrasive polishing was adopted
to manufacture LBO crystal for nano precision surface quality because
of its deliquescent. Ethyl alcohol was selected as the non-water based
slurry solvent and ethanediamine, lactic acid, hydrogen peroxide was
added in the slurry as a chemical additive, respectively. Effect of
different additives with non-water based slurry on material removal
rate, surface topography, microscopic appearances, and surface
roughness were investigated in fixed abrasive polishing of LBO
crystal. The...
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