Nano Effects Of Nitrogen Ion Implantation On Tin Hard Coatings Deposited By Pvd And Ibad

Branko Skoric, Aleksandar Miletic, Pal Terek, Lazar Kovacevic & Milan Kukuruzovic
In this paper, we present the results of a study of TiN thin films which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N5+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The thin film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films. A...
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