The Use of Block-Copolymer Nanolithography to Fabricate Ultrafine Phononic Crystals and Phononic Crystal-Enhanced Devices

Elizabeth Michiko Ashley
In recent years, phononic crystals have emerged as a possible route for engineering the thermal properties of semiconductor materials like silicon independently of their electronic properties. Heat carriers, or thermal phonons, in Si are very difficult to manipulate due to their wide range of frequencies and nanoscale size. Nanostructures are required to most effectively manipulate thermal phonons, but are extremely difficult to fabricate due to resolution limitations of modern lithography equipment. We present in this...
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