Dataset for the publication \"Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements\"

Min Xu, Zhi Li, Michael Fahrbach, Erwin Peiner & Uwe Brand
High-speed tactile roughness measurements set high demand on the trackability of the stylus probe. Because of the features of low mass, low probing force, and high signal linearity, the piezoresistive silicon microprobe is a hopeful candidate for high-speed roughness measurements. This paper investigates the trackability of these microprobes through building a theoretical dynamic model, measuring their resonant response, and performing tip-flight experiments on surfaces with sharp variations. Two microprobes are investigated and compared: one with...
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