Dataset for the publication \"Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements\"

Min Xu, Ziqi Zhou, Thomas Ahbe, Erwin Peiner & Uwe Brand
Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip geometry leads to an increase in measurement uncertainty. To investigate the factors that influence tip geometry variation during roughness measurement, a rectangular-shaped tip characterizer was employed to characterize the tip geometry, and a method for reconstructing the...
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