Calibration of photomasks for optical coordinate metrology

Felix Meli
Optical coordinate measuring machines (CMMs) are widely used in industrial production for fast measurements on complex components. According to ISO 10360-7 the calibration and verification of these CMMs requires certified line scales or grid plates. Additionally, for the determination of the probing error of the imaging probe, masks with form calibrated test circles are compulsory. Using the photomask measuring instrument developed at METAS and using new specific procedures, it is possible to calibrate not only...
This data repository is not currently reporting usage information. For information on how your repository can submit usage information, please see our documentation.