Versatile calibration artefact for optical micro-CMMs based on micro-spheres with engineered surface texture

Rudolf Thalmann, Alain Küng, Anaïs Nicolet, Felix Meli, Christoph Battagli, Michael Marxer & Thomas Jordi
For the calibration and performance verification of optical micro coordinate measuring machines we have developed an artefact which is based on small spherical elements with optically cooperative surfaces. It is in fact a three-dimensional ball plate with a number of different micro-spheres arranged on an amphitheatre-like glass substrate. The micro-spheres were produced with an adequate quality in terms of roughness and sphericity and an engineered surface texture, which is optically cooperative and thus suitable for...
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